Hoehoe Cantilevers Silicon Carbide
Hua taipitopito me te tono
He nui te kawenga o te wafer nui ki te hanga i te miihini hika SiSiC / SiC cantilever hoe / kurupae mo te robot te uta aunoa me te punaha whakahaere na te mea he pumau tana mahi, kaore he rerekee i te teitei o te mahana me te kaha o te kawari paraoa angiangi. Mai i te waahanga o te hoe cantilever he pumau me te kore rereke, ka taea te hanga angiangi rahi ake ma te whakamahi i nga ngongo oumu. Ka taea te whakamahi i te wafer nui te kawenga silicon carbide SiSiC / SiC cantilever hoe / kurupae ki te LPVCD i runga i te ahua o te whakarea whakahiatotanga waiariki me te paninga LPVCD, e roa nei te roa o te tiaki me te huringa horoi, ka tino whakaiti i nga mea poke.
Nga waahanga hangarau o te urupare herea silicon carbide RBSIC:
| tūemi | kōwae | raraunga |
| Tuhinga o mua | ℃ | 1380 |
| kiato | G / cm3 | > = 3.02 |
| Porosity tuwhera | % | <0.1 |
| Te Tauine Paari o Moh | 13 | |
| Pakari piko | Papa | 250 (20 ℃) |
| Papa | 280 (1200 ℃) | |
| Tuhinga o mua | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Te kawe waiariki | W / mk | 45 (1200 ℃) |
| Te whakarea o te whakawhaanui waiariki | K-1 * 10-6 | 4.5 |
| Kawakore-waikawa kawakore | Tino pai |
Āhuahira:
a. Kaore e pakaru i te teitei o te mahana ka nui te kaha o te kawenga angiangi;
b. He tino awangawanga awangawanga awangawanga me te roa o te ratonga mahi;
c. Ko te whakarea roha waiariki o te hoe cantilever he iti rawa, e tino roa ana te tiaki me te huringa horoi;
me te whakaheke rawa i nga whakapoke
Ko etahi atu o nga taonga o te oumu i hangaia e te karamika karamika
I tua atu i te Reaction sinicon silicon carbide SiSiC cantilever hoe mo te kawenga o te wafer, ka whakaputahia e maatau etahi atu taonga taapiri tae atu ki nga RBSIC / SISIC silicon carbide kurupae, ngongo ngongo, ngongo ngongo porowhita, ngongo porowhita hurihuri, waikura hono here i te waikawa SIC silicon / he pereti pereti me nga paina tautau a RBSIC .
Mau ki te RBSIC ātete / SISIC hua karika silicon
Na te mea e whai kiko ana ta tatou hua RBSIC / SISIC silicon carbide ki te aukati i te kakahu pai, ki te aukati i te waikura me te roa o te mahi, ka taea hoki te whakakakahu i nga raina aukati e taea ai te whakauru i nga paipa tukatuka, i nga hurihuri ranei.
