Hoehoe Cantilevers Silicon Carbide

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Taipitopito Hua

Tohu Hua

Hua taipitopito me te tono
He nui te kawenga o te wafer nui ki te hanga i te miihini hika SiSiC / SiC cantilever hoe / kurupae mo te robot te uta aunoa me te punaha whakahaere na te mea he pumau tana mahi, kaore he rerekee i te teitei o te mahana me te kaha o te kawari paraoa angiangi. Mai i te waahanga o te hoe cantilever he pumau me te kore rereke, ka taea te hanga angiangi rahi ake ma te whakamahi i nga ngongo oumu. Ka taea te whakamahi i te wafer nui te kawenga silicon carbide SiSiC / SiC cantilever hoe / kurupae ki te LPVCD i runga i te ahua o te whakarea whakahiatotanga waiariki me te paninga LPVCD, e roa nei te roa o te tiaki me te huringa horoi, ka tino whakaiti i nga mea poke.

Nga waahanga hangarau o te urupare herea silicon carbide RBSIC: 

tūemi kōwae raraunga
Tuhinga o mua 1380
kiato G / cm3 > = 3.02
Porosity tuwhera % <0.1
Te Tauine Paari o Moh   13
Pakari piko Papa 250 (20 ℃)
Papa 280 (1200 ℃)
Tuhinga o mua Gpa 330 (20 ℃)
Gpa 300 (1200 ℃)
Te kawe waiariki W / mk 45 (1200 ℃)
Te whakarea o te whakawhaanui waiariki K-1 * 10-6 4.5
Kawakore-waikawa kawakore   Tino pai

Āhuahira:
a. Kaore e pakaru i te teitei o te mahana ka nui te kaha o te kawenga angiangi;
b. He tino awangawanga awangawanga awangawanga me te roa o te ratonga mahi;
c. Ko te whakarea roha waiariki o te hoe cantilever he iti rawa, e tino roa ana te tiaki me te huringa horoi;
me te whakaheke rawa i nga whakapoke

Ko etahi atu o nga taonga o te oumu i hangaia e te karamika karamika 
I tua atu i te Reaction sinicon silicon carbide SiSiC cantilever hoe mo te kawenga o te wafer, ka whakaputahia e maatau etahi atu taonga taapiri tae atu ki nga RBSIC / SISIC silicon carbide kurupae, ngongo ngongo, ngongo ngongo porowhita, ngongo porowhita hurihuri, waikura hono here i te waikawa SIC silicon / he pereti pereti me nga paina tautau a RBSIC .

Mau ki te RBSIC ātete / SISIC hua karika silicon
Na te mea e whai kiko ana ta tatou hua RBSIC / SISIC silicon carbide ki te aukati i te kakahu pai, ki te aukati i te waikura me te roa o te mahi, ka taea hoki te whakakakahu i nga raina aukati e taea ai te whakauru i nga paipa tukatuka, i nga hurihuri ranei.


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